Home > News > FEI Announces Multiple Orders for 3D Metrology Systems
April 24th, 2003
FEI Announces Multiple Orders for 3D Metrology Systems
Abstract:
FEI Company today announced that it has received multiple
orders for its Certus 3D(TM), FEI's latest in-line DualBeam(TM) system
designed to support new process nodes for the next generation of advanced
thin-film heads. The Certus 3D was engineered with input from FEI's data
storage customers as they prepared to transition to new process nodes
requiring greater precision at feature sizes down to 40 nm.
Source:
PRNewswire
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