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Abstract:
As key providers of leading edge process technology equipment for HBLED manufacture, Oxford Instruments has been a major part of the HBLED industry since its very beginning. Now the company’s systems are being used to facilitate the introduction of UV LEDs, being utilised in water purification systems to bring safe drinking water to remote places.

Oxford Instruments systems now facilitate water purification technology

Abingdon, UK | Posted on September 27th, 2016

Oxford Instruments PlasmaPro1000 Stratum PECVD tool is used for depositing high quality dielectrics essential in the manufacture of UV LEDs. The film quality, batch size and throughput make it an ideal tool to facilitate this latest technology. The systems are ideal for the production of UV LEDs as they can produce the thicker passivation layers that UV LEDs need to operate reliably at high powers while maintaining film quality and low cost of ownership. The batch size of upto 14 x 4” wafers is enabled by the chamber design which ensures each wafer within the batch achieves the same amount of high specification film deposition. Advanced tool technology ensures fast plasma clean of the chamber, which is automatically controlled through Optical Emission Spectroscopy (OES), and maximum yield and uptime are then realised.

“UV LEDs have several advantages over traditional UV light sources” comments Dr Mark Dineen, Optoelectronics Product Manager at Oxford Instruments Plasma Technology. “They operate at low DC power, meaning that they can be powered from a solar energy source. Combined with the fact that they are lighter and more robust than the traditional sources, this makes them ideally suited for use in remote, off grid locations where clean water supplies are limited or none existent.”

“UV LED’s are also tuned to the optimum wavelength for the removal of bacteria, making them significantly more effective in purifying water than traditional light sources. Lastly, UV LED’s do not contain mercury, an essential component part of traditional UV lamps. Consequently there is a significant reduction in the environmental impact risk, through both accidental contamination and the need for recycling when comparing UV LED’s and traditional UV lamps.”

Oxford Instruments Plasma Technology continues to provide innovative high technology plasma processing solutions, powering today’s advances and protecting tomorrow’s environment.

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About Oxford Instruments plc
Oxford Instruments designs, supplies and supports high-technology tools and systems with a focus on research and industrial applications. Innovation has been the driving force behind Oxford Instruments' growth and success for over 50 years, and its strategy is to effect the successful commercialisation of these ideas by bringing them to market in a timely and customer-focused fashion. The first technology business to be spun out from Oxford University, Oxford Instruments is now a global company and is listed on the London Stock Exchange (OXIG). Its objective is to be the leading provider of new generation tools and systems for the research and industrial sectors with a focus on nanotechnology. Its key market sectors include nano-fabrication and nano-materials. The company’s strategy is to expand the business into the life sciences arena, where nanotechnology and biotechnology intersect

This involves the combination of core technologies in areas such as low temperature, high magnetic field and ultra high vacuum environments; Nuclear Magnetic Resonance; X-ray, electron, laser and optical based metrology; atomic force microscopy; optical imaging; advanced growth, deposition and etching.

Oxford Instruments aims to pursue responsible development and deeper understanding of our world through science and technology. Its products, expertise, and ideas address global issues such as energy, environment, security and health.

About Oxford Instruments Plasma Technology

Oxford Instruments Plasma Technology offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable engineering of micro- and nano-structures. Our systems provide process solutions for the etching of nanometre sized features, nanolayer deposition and the controlled growth of nanostructures.

These solutions are based on core technologies in plasma-enhanced deposition and etch, ion-beam deposition and etch, atomic layer deposition, deep silicon etch and physical vapour deposition. Products range from compact stand-alone systems for R&D, through batch tools and up to clustered cassette-to-cassette platforms for high-throughput production processing.

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Contacts:
Susie Williams
Marketing Communications Manager
Oxford Instruments Plasma Technology

Tel: +44 (0)1934 837000
Fax: +44 (0)1934 837001

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