Home > News > Nanometrics and Dainippon Screen Form Supplier Agreement
February 12th, 2004
Nanometrics and Dainippon Screen Form Supplier Agreement
Abstract:
Nanometrics Inc., a leading supplier of standalone and integrated advanced metrology systems, and Dainippon Screen Manufacturing Company Ltd., have recently concluded an agreement whereby Nanometrics will supply Dainippon Screen (DNS) with metrology units for integration into DNS' newly released RF3 Coater/Developer. The Nanometrics unit, which will be installed in the DNS track in its demonstration lab, will enable in-line film thickness and optical critical dimension (OCD) measurement for advanced deep-UV lithography.
Source:
Businesswire
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